In this experiment , in - diffusion of oxygen during rtf was not detected 但本實驗并未觀察到高溫rtp處理中氧的內擴散行為。
It is assumed that as enhances the out - diffusion of oxygen atoms near the surface of si wafers . ig effect is also gained in heavily b - , p - and sb - doped si wafers respectively 在該吸除工藝下,重摻b 、 p 、 sb硅片表面也形成了不同寬度的清潔區,體內出現了較高密度的氧沉淀。
The investigation presents a new method of dipping sic kiln furniture into 2 saturable solution or into the saturable solution of ca3 ( po4 ) 2 and a1po4 in order to beneficial to its crystalline structure change and its properties , to make it packed and decrease its porosity . it can also hinder the diffusion of oxygen so as to decrease the oxidation rate and lengthen the useful life . the mechanism of dipping two kinds of phosphate saturable solution were studied and proved by the results of scanning electron microscope 本研究首次采用sic窯具材料浸漬ca _ 3 ( po _ 4 ) _ 2飽和溶液和浸漬ca _ 3 ( po _ 4 ) _ 2與alpo _ 4混合飽和溶液的方法,目的在于有利于窯具材料晶相結構的轉化和性能的優化;能堵塞材料的氣孔,降低透氣率,阻礙o _ 2擴散,降低氧化速度,延長窯具材料的使用壽命。